PhotonIcs and Electromagnetics Research Symposium,
also known as Progress In Electromagnetics Research Symposium
PIERS Proceedings
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Published by The Electromagnetics Academy
Published: 2015-08-28
Higher-order Ring Resonators and Delayed Interferometers Based on 300-mm SOI Technology for WDM Applications
By
Seok-Hwan Jeong,
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    Seok-Hwan Jeong

    Photonics Electronics Technology Research Association (PETRA), Japan

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Ken Morito,
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    Ken Morito

    Photonics Electronics Technology Research Association (PETRA), Japan

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Yu Tanaka
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    Yu Tanaka

    Photonics Electronics Technology Research Association (PETRA), Japan

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Proceedings of 2015 Photonics & Electromagnetics Research Symposium, Prague, July 6 - 9，Page(s)374-377
Abstract
We introduce high-performance Si-nanowire WDM devices based on higher-order coupled resonator optical waveguides (CROW) and multi-stage delayed Mach-Zehnder interfer- ometers (DMZI) fabricated by 300-mm SOI wafer-scale ArF-immersion lithography process. For the two kinds of WDM devices, we experimentally demonstrate low insertion loss, spectral flatness and low crosstalk properties, together with high manufacturing tolerances.
Citation
Seok-Hwan Jeong, Ken Morito, and Yu Tanaka, "Higher-order Ring Resonators and Delayed Interferometers Based on 300-mm SOI Technology for WDM Applications," Proceedings of 2015 Photonics & Electromagnetics Research Symposium, Prague, July 6 - 9，Page(s)374-377
References

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