PhotonIcs and Electromagnetics Research Symposium,
also known as Progress In Electromagnetics Research Symposium
PIERS Proceedings
PIER Journals
Published by The Electromagnetics Academy
Published: 2015-08-28
A MZI Based Integrated Optical Accelerometer
By
Tong Zhang,
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    Tong Zhang

    Southeast University, China

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Wei Hu,
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    Wei Hu

    Southeast University, China

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Ruo-Zhou Li,
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    Ruo-Zhou Li

    Southeast University, China

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Guang Qian,
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    Guang Qian

    Southeast University, China

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Jie Tang,
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    Jie Tang

    Southeast University, China

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Feng-Hua Wan
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    Feng-Hua Wan

    Southeast University, China

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Proceedings of 2015 Photonics & Electromagnetics Research Symposium, Prague, July 6 - 9，Page(s)1272-1276
Abstract
We demonstrate an optical accelerometer based on geometrically asymmetric Mach- Zehnder interferometer which is proposed to be fabricated on a flexible substrate. The asymmetric MZI based device made by polymer waveguides and substrate to realize the elastic property with a double arms cantilever beam. The relation between the structure parameters and the sensitivity are analyzed. A prototype is fabricated and a detecting experiment scheme designed for this flexible optical accelerometer is proposed. Due to simplicity of the structure, the sensor is suitable for mass production.
Citation
Tong Zhang, Wei Hu, Ruo-Zhou Li, Guang Qian, Jie Tang, and Feng-Hua Wan, "A MZI Based Integrated Optical Accelerometer," Proceedings of 2015 Photonics & Electromagnetics Research Symposium, Prague, July 6 - 9，Page(s)1272-1276
References

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