PhotonIcs and Electromagnetics Research Symposium,
also known as Progress In Electromagnetics Research Symposium
PIERS Proceedings
Published: 2015-07-09
Advanced Building Blocks in Thick Silicon on Insulator Technology: Echelle Grating Multiplexers and Reflective Multimode Interference Couplers
By
Proceedings of 2015 Photonics & Electromagnetics Research Symposium, Prague, July 6 - 9,Page(s)1864-1869
Abstract
In this paper we present the design, fabrication and experimental demonstration of advanced building blocks in a thick Silicon generic photonic integration platform. The platform provides a fabrication process with waveguides of different contrast ratio, through different etch levels, and the possibility of metalization in selected areas. Combining waveguiding and metals we report on Echelle Gratings (EG) multiplexers and reflective Multimode Interference (R-MMI) couplers. Several devices were designed in the same reticle and several dies were supplied by the fabrication platform. The experimental results for the individual devices are reported, as well as a die to die comparison and statistical analysis.
Citation
Jose David Domenech, Pascual Munoz, Bernardo Gargallo, Javier S. Fandino, and R. Banos, "Advanced Building Blocks in Thick Silicon on Insulator Technology: Echelle Grating Multiplexers and Reflective Multimode Interference Couplers," Proceedings of 2015 Photonics & Electromagnetics Research Symposium, Prague, July 6 - 9,Page(s)1864-1869
References

1. "Towards a foundry model for micro- and nanophotonic ics," European Network of Excellence on Photonic Integrated Components and Circuits, March 2007.        Google Scholar

2. Munoz, P., J. Domenech, et al., "Evolution of fabless generic photonic integration," 2013 15th International Conference on Transparent Optical Networks (ICTON), June 2013.        Google Scholar

3. Aalto, T., M. Cherchi, et al., "Launching of multi-project wafer runs in epixfab with micronscale silicon rib waveguide technology," Proc. SPIE, Vol. 8990, 899003-1-899003-11, 2014.        Google Scholar

4. Soref, R. A., "Silicon-based optoelectronics," Proceedings of the IEEE, Vol. 81, No. 12, 1687-1706, December 1993.        Google Scholar

5. Mounier, E. and C. Troadec, "Silicon photonics 2014," Yole Development, Tech. Rep., 2014.        Google Scholar

6. Aalto, T., M. Cherchi, et al., "Dense photonics integration on a micron-scale SOI waveguide platform," 2013 IEEE 10th International Conference on Group IV Photonics (GFP), 107-108, August 2013.        Google Scholar

7. Dai, D. and J. E. Bowers, "Silicon-based on-chip multiplexing technologies and devices for peta-bit optical interconnects," Nanophotonics, Vol. 3, 283-311, 2014.        Google Scholar

8. Feng, D., W. Qian, et al., "Fabrication insensitive echelle grating in silicon-on-insulator platform," IEEE Photonics Technology Letters, Vol. 23, No. 5, 284-286, 2011.        Google Scholar

9. Pathak, S., P. Dumon, et al., "Comparison of AWGs and echelle gratings for wavelength division multiplexing on silicon-on-insulator," IEEE Photonics Journal, Vol. 6, No. 5, 1-9, October 2014.        Google Scholar

10. Bidnyk, S., D. Feng, et al., "Silicon-on-insulator-based planar circuit for passive optical network applications," IEEE Photonics Technology Letters, Vol. 18, No. 22, 2392-2394, November 2006.        Google Scholar

11. Bogaerts, W., S. Selvaraja, et al., "Silicon-on-insulator spectral filters fabricated with CMOS technology," IEEE Journal of Selected Topics in Quantum Electronics, Vol. 16, No. 1, 33-44, January 2010.        Google Scholar

12. Horst, F., W. Green, et al., "Silicon-on-insulator echelle grating WDM demultiplexers with two stigmatic points," IEEE Photonics Technology Letters, Vol. 21, No. 23, 1743-1745, December 2009.        Google Scholar

13. Brouckaert, J., W. Bogaerts, et al., "Planar concave grating demultiplexer fabricated on a nanophotonic silicon-on-insulator platform," Journal of Lightwave Technology, Vol. 25, No. 5, 1269-1275, May 2007.        Google Scholar

14. Saleh, B. and M. Teich, Fundamentals of Photonics, 2nd Ed., Chap. 6, 197-242, Wiley, 2007.        Google Scholar

15. Lycett, R., D. Gallagher, and V. Brulis, "Perfect chirped echelle grating wavelength multiplexor: Design and optimization," IEEE Photonics Journal, Vol. 5, No. 2, 2400123, April 2013.        Google Scholar

16. Cherchi, M., S. Ylinen, et al., "MMI resonators based on metal mirrors and MMI mirrors: An experimental comparison," Opt. Express, Vol. 23, No. 5, 5982-5993, March 2015.        Google Scholar

17. Fandio, J. S., J. D. Domnech, and P. Muoz, "Two-port multimode interference reflectors based on aluminium mirrors in a thick SOI platform," Physics Optics, arXiv: 1504.01549, Online Available: http://arxiv.org/abs/1504.01549.        Google Scholar

18. Piels, M., J. Bauters, et al., "Low-loss silicon nitride AWG demultiplexer heterogeneously integrated with hybrid III-V/silicon photodetectors," Journal of Lightwave Technology, Vol. 32, No. 4, 817-823, February 2014.        Google Scholar