PhotonIcs and Electromagnetics Research Symposium,
also known as Progress In Electromagnetics Research Symposium
PIERS Proceedings
Published: 2015-07-09
Femtosecond Laser Ablation of Thin Films on Substrate
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Proceedings of 2015 Photonics & Electromagnetics Research Symposium, Prague, July 6 - 9,Page(s)2422-2426
Abstract
Our targets are thin (60–100 nm thick) plane metal films (here gold is considered) on a dielectric substrate (fused silica below). We consider laser action onto such targets. A femtosecond laser pulse with durations 30–300 fs is used. Thermal and mechanical behavior of those targets qualitatively differs from behavior of bulk targets and from freestanding films. A weakly conductive substrate works as a heat insulating wall if we compare the bulk target and the film/silica target, thus slowing down cooling of metal due to the heat conduction loses into bulk. While hydromechanical interaction of the film with the silica changes the situation in comparison with the freestanding case when both sides of a film are vacuum boundaries. From the one hand, the silica counteracts against an expansion of metal into the glass. From the other hand, a cohesion force between the metal and silica resists to separation of film from substrate. Situations with the bulk targets and freestanding films were studied before. In the paper for the first time we present descriptions of possible regimes of film/silica dynamics. They depend on absorbed fluence, two-temperature physics, and a value of a cohesion force. Electrons are much hotter than ions at a two-temperature stage. Two-temperature effects are dynamically significant because in case of gold with its delayed electron-ion relaxation the electron pressure contributes into momentum of a film while an electron conductivity (enhanced at a two-temperature stage) together with a rate of electron energy transfer into ion subsystem define energy redistribution across a thickness of a film.
Citation
S. I. Anisimov, Nail A. Inogamov, Konstantin V. Khishchenko, V. A. Khokhlov, Yu. V. Petrov, and V. V. Zhakhovsky, "Femtosecond Laser Ablation of Thin Films on Substrate," Proceedings of 2015 Photonics & Electromagnetics Research Symposium, Prague, July 6 - 9,Page(s)2422-2426
References