PhotonIcs and Electromagnetics Research Symposium,
also known as Progress In Electromagnetics Research Symposium
PIERS Proceedings
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Published by The Electromagnetics Academy
Published: 2015-07-09
Hydrogen and Humidity Sensing Based on WGMs of Elastic Polymer Optical Microresonators
By
Alper Kiraz,
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    Alper Kiraz

    Koc University, Turkey

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S. Anand,
Mustafa Eryurek,
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    Mustafa Eryurek

    Koc University, Turkey

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Y. Karadag,
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    Y. Karadag

    Marmara University, Turkey

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N. Kilinc
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    N. Kilinc

    Nigde University, Turkey

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Proceedings of 2015 Photonics & Electromagnetics Research Symposium, Prague, July 6 - 9，Page(s)892-895
Abstract
We report hydrogen and humidity sensor employing elastic polymer (SU-8) optical microresonators. The sensing mechanism relies on the optical whispering gallery mode (WGM) resonance shifts in the transmission spectra of these microresonators. WGMs are excited through SU-8 waveguides in which a tunable laser light is coupled from an optical fiber. Relative humidity between 0 and 65% is detected at room temperature. For hydrogen sensing, the microresonators are coated with a thin layer of palladium (Pd) metal layer to increase the sensing performance. Hydrogen gas is detected reversibly between 0.3 and 1.5%. Hydrogen gas concentrations higher than 1.5% result irreversible degradation of the devices because of a phase transition occurring in the Pd layer.
Citation
Alper Kiraz, S. Anand, Mustafa Eryurek, Y. Karadag, and N. Kilinc, "Hydrogen and Humidity Sensing Based on WGMs of Elastic Polymer Optical Microresonators," Proceedings of 2015 Photonics & Electromagnetics Research Symposium, Prague, July 6 - 9，Page(s)892-895
References

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