Proceedings of 2015 Photonics & Electromagnetics Research Symposium, Prague, July 6 - 9,Page(s)2723-2726
Abstract
In this paper, a simple compact size microwave plasma reactor (MPR) based on
2.45 GHz 700 W home used microwave oven has been design and constructed for use in laboratory.
Main design criteria were low cost and available of parts and components in home country, in
order to make it easy to use, to repair, to move and no leak of microwave radiation. This system
consist of reactor vessel, mini air pump and solution container with heater. The reactor vessel
is made from 800 ml Pyrex beaker with two pipes mounted on the aluminum cover plate of
vessel for injection and exhaust gas. The quarter wavelength electrode unit consisting of five
tungsten rods is placed on a circular aluminum plate with diameter λ/2 for used to generating
plasma. Currently the microwave plasma reactor built is being used to be microwave plasma
chemical vapor deposition system (MPCVD). However, such a system can easily be adapted to
serve as surface cleaner of substrate. The fabricated system is used to test the produce carbon
nanoparticle from ethanol vapor and treatment of hydrophobic glass by measuring in contact
angle with water drops.
Citation
T. Chim-Oye,
Manu Fuangfoong,
and
Rungroj Pongsopon,
"Microwave Plasma Reactor Based on Microwave Oven," Proceedings of 2015 Photonics & Electromagnetics Research Symposium, Prague, July 6 - 9,Page(s)2723-2726